Vac­uum Processes

For analy­sis and tests, fea­si­bil­ity stud­ies and small series vac­uum pro­ceeses can be pre­pared and per­formed in dif­fer­ent sized cham­bers and setups for pres­sure lev­els down to 10 – 9 mbar.

Such processes under vac­uum can be com­bined with a big vari­aty of phys­i­cal and/​or chem­i­cal pro­ce­dures like vapor depo­si­tion, plasma etch­ing, clean­ing, reac­tive mix­ing and many other.